Inventor
JOHNSGARD KRISTIAN E
US15 patents
⚠️ This page may combine multiple inventors who share the name “JOHNSGARD KRISTIAN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
13 patentsUS6200634B1Mar 13, 2001
Thermal processing system with supplemental resistive heater and shielded optical pyrometry
MATTSON TECH INC143 citations98
US6172337B1Jan 9, 2001
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC190 citations98
US5830277ANov 3, 1998
Thermal processing system with supplemental resistive heater and shielded optical pyrometry
MATTSON TECH INC172 citations98
US6342691B1Jan 29, 2002
Apparatus and method for thermal processing of semiconductor substrates
MATTSON TECH INC111 citations97
US6301434B1Oct 9, 2001
Apparatus and method for CVD and thermal processing of semiconductor substrates
MATTSON TECH INC133 citations96
US6403925B1Jun 11, 2002
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC47 citations95
US6046439AApr 4, 2000
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC49 citations95
US6002109ADec 14, 1999
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC80 citations95
US6399921B1Jun 4, 2002
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC20 citations92
US6043460AMar 28, 2000
System and method for thermal processing of a semiconductor substrate
MATTSON TECH INC19 citations92
US6902622B2Jun 7, 2005
Systems and methods for epitaxially depositing films on a semiconductor substrate
MATTSON TECH INC38 citations89
US6436796B1Aug 20, 2002
Systems and methods for epitaxial processing of a semiconductor substrate
MATTSON TECH INC43 citations89
US7176417B2Feb 13, 2007
Apparatuses and methods for resistively heating a thermal processing system
MATTSON TECH INC7 citations69