Inventor

OHSHITA YOSHIO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OHSHITA YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC CORP

2 patents

US5789321AAug 4, 1998

Method for forming a barrier metal layer made of titanium nitride on a silicon substrate

NEC CORP25 citations88

US5515985AMay 14, 1996

Method of forming fine copper conductor pattern

NEC CORP16 citations65

TRI CHEMICAL LAB INC

2 patents

US7045457B2May 16, 2006

Film forming material, film forming method, and silicide film

TRI CHEMICAL LAB INC5 citations60

US7312140B2Dec 25, 2007

Film forming method

TRI CHEMICAL LAB INC1 citations50