Inventor
NASER-GHODSI MEHRAN
US4 patents
⚠️ This page may combine multiple inventors who share the name “NASER-GHODSI MEHRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS6843927B2Jan 18, 2005
Method and apparatus for endpoint detection in electron beam assisted etching
KLA TENCOR TECH CORP42 citations88
US7879730B2Feb 1, 2011
Etch selectivity enhancement in electron beam activated chemical etch
KLA TENCOR TECH CORP11 citations81
US7709792B2May 4, 2010
Three-dimensional imaging using electron beam activated chemical etch
KLA TENCOR TECH CORP7 citations70