Inventor
GARCIA RUDY F
US27 patents
⚠️ This page may combine multiple inventors who share the name “GARCIA RUDY F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
18 patentsUS9544984B2Jan 10, 2017
System and method for generation of extreme ultraviolet light
KLA TENCOR CORP10 citations82
US9810991B2Nov 7, 2017
System and method for cleaning EUV optical elements
KLA TENCOR CORP5 citations72
US10021773B2Jul 10, 2018
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA TENCOR CORP4 citations71
US10395884B2Aug 27, 2019
Ruthenium encapsulated photocathode electron emitter
KLA TENCOR CORP2 citations70
US9422978B2Aug 23, 2016
Gas bearing assembly for an EUV light source
KLA TENCOR CORP3 citations69
US10893599B2Jan 12, 2021
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA TENCOR CORP0 citations61
US10880979B2Dec 29, 2020
Droplet generation for a laser produced plasma light source
KLA TENCOR CORP1 citations61
US10953441B2Mar 23, 2021
System and method for cleaning optical surfaces of an extreme ultraviolet optical system
KLA TENCOR CORP1 citations60
US10748737B2Aug 18, 2020
Electron beam generation and measurement
KLA TENCOR CORP1 citations60
US10535493B2Jan 14, 2020
Photocathode designs and methods of generating an electron beam using a photocathode
KLA TENCOR CORP1 citations60
US8052885B2Nov 8, 2011
Structural modification using electron beam activated chemical etch
KLA TENCOR CORP2 citations60
US7755042B1Jul 13, 2010
Auger electron spectrometer with applied magnetic field at target surface
KLA TENCOR CORP2 citations60
US10714307B2Jul 14, 2020
Neutral atom imaging system
KLA TENCOR CORP0 citations52
US10804069B2Oct 13, 2020
Photocathode designs and methods of generating an electron beam using a photocathode
KLA TENCOR CORP0 citations49
US10714295B2Jul 14, 2020
Metal encapsulated photocathode electron emitter
KLA TENCOR CORP0 citations49
US10607806B2Mar 31, 2020
Silicon electron emitter designs
KLA TENCOR CORP0 citations49
US10714294B2Jul 14, 2020
Metal protective layer for electron emitters with a diffusion barrier
KLA TENCOR CORP0 citations48
US10840055B2Nov 17, 2020
System and method for photocathode illumination inspection
KLA TENCOR CORP0 citations46
KLA CORP
4 patentsUS11419202B2Aug 16, 2022
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
KLA CORP0 citations61
US11343899B2May 24, 2022
Droplet generation for a laser produced plasma light source
KLA CORP0 citations61
US12444643B2Oct 14, 2025
Method and apparatus for positioning optical isolator assembly with replaceable motor assembly
KLA CORP0 citations58
US12158576B2Dec 3, 2024
Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systems
KLA CORP0 citations46
KLA TENCOR TECH CORP
2 patentsUS7304302B1Dec 4, 2007
Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis
KLA TENCOR TECH CORP55 citations92
US7879730B2Feb 1, 2011
Etch selectivity enhancement in electron beam activated chemical etch
KLA TENCOR TECH CORP11 citations81