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Inventor
YU MING LUN
US
13 patents
⚠️ This page may combine multiple inventors who share the name “YU MING LUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BECK MARKUS E
3 patents
US8734536B2
May 27, 2014
Temperature-adjusted spectrometer
BECK MARKUS E
7 citations
82
US8472021B2
Jun 25, 2013
Particle detector
BECK MARKUS E
0 citations
51
US8646408B2
Feb 11, 2014
Flux monitor
BECK MARKUS E
0 citations
50
KLA TENCOR TECH CORP
2 patents
US7879730B2
Feb 1, 2011
Etch selectivity enhancement in electron beam activated chemical etch
KLA TENCOR TECH CORP
11 citations
81
US8008207B2
Aug 30, 2011
Use of ion implantation in chemical etching
KLA TENCOR TECH CORP
3 citations
62
KLA TENCOR CORP
2 patents
US7635842B2
Dec 22, 2009
Method and instrument for chemical defect characterization in high vacuum
KLA TENCOR CORP
6 citations
72
US8052885B2
Nov 8, 2011
Structural modification using electron beam activated chemical etch
KLA TENCOR CORP
2 citations
60
ADVANCED SEMICONDUCTOR ENG
2 patents
US11876551B2
Jan 16, 2024
Electronic module
ADVANCED SEMICONDUCTOR ENG
2 citations
71
US12401387B2
Aug 26, 2025
Electronic module
ADVANCED SEMICONDUCTOR ENG
0 citations
60
FIRST SOLAR INC
2 patents
US9406829B2
Aug 2, 2016
Method of manufacturing a photovoltaic device
FIRST SOLAR INC
0 citations
51
US9383316B2
Jul 5, 2016
Method of measuring vapor flux density
FIRST SOLAR INC
0 citations
50
APPLIED MATERIALS INC
1 patent
US7417233B2
Aug 26, 2008
Beam exposure correction system and method
APPLIED MATERIALS INC
5 citations
60
TOTH GABOR
1 patent
US8237120B1
Aug 7, 2012
Transverse focusing action in hyperbolic field detectors
TOTH GABOR
3 citations
59