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Inventor
KRZECZOWSKI KENNETH
US
3 patents
⚠️ This page may combine multiple inventors who share the name “KRZECZOWSKI KENNETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
2 patents
US7879730B2
Feb 1, 2011
Etch selectivity enhancement in electron beam activated chemical etch
KLA TENCOR TECH CORP
11 citations
81
US7709792B2
May 4, 2010
Three-dimensional imaging using electron beam activated chemical etch
KLA TENCOR TECH CORP
7 citations
70
KLA TENCOR CORP
1 patent
US8052885B2
Nov 8, 2011
Structural modification using electron beam activated chemical etch
KLA TENCOR CORP
2 citations
60