Inventor
LENT MATTHEW
US10 patents
⚠️ This page may combine multiple inventors who share the name “LENT MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GATAN INC
5 patentsUS9696435B2Jul 4, 2017
Hybrid energy conversion and processing detector
GATAN INC8 citations82
US9966220B2May 8, 2018
Electron energy loss spectrometer using direct detection sensor
GATAN INC5 citations77
US10215865B2Feb 26, 2019
Hybrid energy conversion and processing detector
GATAN INC1 citations61
US12057515B2Aug 6, 2024
Electronic imaging detector with thermal conduction layer
GATAN INC0 citations56
US10535492B2Jan 14, 2020
Electron energy loss spectrometer using direct detection sensor
GATAN INC0 citations45
KLA TENCOR TECH CORP
4 patentsUS7838833B1Nov 23, 2010
Apparatus and method for e-beam dark imaging with perspective control
KLA TENCOR TECH CORP29 citations89
US7879730B2Feb 1, 2011
Etch selectivity enhancement in electron beam activated chemical etch
KLA TENCOR TECH CORP11 citations81
US6995369B1Feb 7, 2006
Scanning electron beam apparatus and methods of processing data from same
KLA TENCOR TECH CORP7 citations72
US7709792B2May 4, 2010
Three-dimensional imaging using electron beam activated chemical etch
KLA TENCOR TECH CORP7 citations70