Inventor

MACDONALD NILES K

US5 patents

⚠️ This page may combine multiple inventors who share the name “MACDONALD NILES K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

REFLECTIVITY INC

1 patent

US6949202B1Sep 27, 2005

Apparatus and method for flow of process gas in an ultra-clean environment

REFLECTIVITY INC34 citations92

KLA TENCOR TECH CORP

1 patent

US7879730B2Feb 1, 2011

Etch selectivity enhancement in electron beam activated chemical etch

KLA TENCOR TECH CORP11 citations81

TEXAS INSTRUMENTS INC

1 patent

US7189332B2Mar 13, 2007

Apparatus and method for detecting an endpoint in a vapor phase etch

TEXAS INSTRUMENTS INC8 citations73

KLA TENCOR CORP

1 patent

US8052885B2Nov 8, 2011

Structural modification using electron beam activated chemical etch

KLA TENCOR CORP2 citations60

GASONICS INTERNAT

1 patent

US6175095B1Jan 16, 2001

Resonant impedance-matching slow-wave ring structure microwave applicator for plasmas

GASONICS INTERNAT3 citations58