Inventor

WEI AN CHYI

TW35 patents

⚠️ This page may combine multiple inventors who share the name “WEI AN CHYI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WEI AN CHYI

TAIWAN SEMICONDUCTOR MFG CO LTD

Method for forming fin field effect transistor (FinFET) device structure

FinFET device and method

Cut metal gate processes

Cut metal gate processes

Air spacers around contact plugs and method forming same

Semiconductor device and method of manufacture

Multi-gate device fabrication and structures thereof

Air spacers around contact plugs and method forming same

Semiconductor device and method of manufacture

Nanostructure field-effect transistor device and method of forming

Method for forming fin field effect transistor (FinFET) device structure

Method for forming fin field effect transistor (FinFet) device structure

Fin field effect transistor (FinFET) device structure and method for forming the same

FinFET device and method

Cut metal gate processes

Air spacers around contact plugs and method forming same

Air spacer and method of forming same

Cut metal gate processes

Air spacer and method of forming same

Air spacer and method of forming same

Nanostructure field-effect transistor device and method of forming

Method of forming semiconductor device and semiconductor device

Fin field-effect transistor with void and method of forming the same

FinFET device and method

Fin field-effect transistor with void and method of forming the same

Method of forming semiconductor structure and semiconductor device

Semiconductor device structure and methods of forming the same

MACRONIX INT CO LTD

Method of forming self-aligned contacts and local interconnects

Composite hard mask etching profile for preventing pattern collapse in high-aspect-ratio trenches

Process of forming a self-aligned contact in a semiconductor device

Method of fabricating deep trench semiconductor devices, and deep trench semiconductor devices

Semiconductor structure and manufacturing method of the same

Plasma etching methods using nitrogen memory species for sustaining glow discharge

Method of word-line formation by semi-damascene process with thin protective conductor layer

WEI AN CHYI

Method of forming self-aligned contacts and local interconnects