Inventor
WITHERS JR HOWARD PAUL
US12 patents
⚠️ This page may combine multiple inventors who share the name “WITHERS JR HOWARD PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
11 patentsUS6583048B2Jun 24, 2003
Organosilicon precursors for interlayer dielectric films with low dielectric constants
AIR PROD & CHEM761 citations98
US6686594B2Feb 3, 2004
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
AIR PROD & CHEM53 citations94
US6514471B1Feb 4, 2003
Removing fluorine from semiconductor processing exhaust gas
AIR PROD & CHEM25 citations92
US7087102B2Aug 8, 2006
Process for purification of germane
AIR PROD & CHEM13 citations83
US9284198B2Mar 15, 2016
Process for making trisilylamine
AIR PROD & CHEM5 citations78
US6352676B1Mar 5, 2002
Abatement of F2 using small particle fluidized bed
AIR PROD & CHEM11 citations73
US6106790AAug 22, 2000
Abatement of NF3 using small particle fluidized bed
AIR PROD & CHEM8 citations73
US5910294AJun 8, 1999
Abatement of NF3 with metal oxalates
AIR PROD & CHEM10 citations72
US6790428B2Sep 14, 2004
Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
AIR PROD & CHEM9 citations66
US7074378B2Jul 11, 2006
Process for the purification of NF3
AIR PROD & CHEM4 citations61
US9463978B2Oct 11, 2016
Process for making trisilylamine
AIR PROD & CHEM0 citations46