Inventor
YEH RENN-SHYAN
TW4 patents
Patents
4 patentsUS6017771AJan 25, 2000
Method and system for yield loss analysis by yield management system
TAIWAN SEMICONDUCTOR MFG80 citations94
US6389323B1May 14, 2002
Method and system for yield loss analysis by yield management system
TAIWAN SEMICONDUCTOR MFG26 citations90
US6308576B1Oct 30, 2001
Method for determining stress effect on a film during scrubber clean
TAIWAN SEMICONDUCTOR MFG3 citations60
US6153497ANov 28, 2000
Method for determining a cause for defects in a film deposited on a wafer
TAIWAN SEMICONDUCTOR MFG3 citations60