Inventor
HUANG DER-FANG
TW3 patents
Patents
3 patentsUS6436851B1Aug 20, 2002
Method for spin coating a high viscosity liquid on a wafer
TAIWAN SEMICONDUCTOR MFG39 citations89
US6308576B1Oct 30, 2001
Method for determining stress effect on a film during scrubber clean
TAIWAN SEMICONDUCTOR MFG3 citations60
US6153497ANov 28, 2000
Method for determining a cause for defects in a film deposited on a wafer
TAIWAN SEMICONDUCTOR MFG3 citations60