Inventor
CHEN BOMY A
US17 patents
Patents
17 patentsUS6429091B1Aug 6, 2002
Patterned buried insulator
IBM55 citations96
US6287913B1Sep 11, 2001
Double polysilicon process for providing single chip high performance logic and compact embedded memory structure
IBM76 citations96
US6504207B1Jan 7, 2003
Method to create EEPROM memory structures integrated with high performance logic and NVRAM, and operating conditions for the same
IBM67 citations95
US6544874B2Apr 8, 2003
Method for forming junction on insulator (JOI) structure
IBM48 citations93
US6686617B2Feb 3, 2004
Semiconductor chip having both compact memory and high performance logic
IBM36 citations92
US6518614B1Feb 11, 2003
Embedded one-time programmable non-volatile memory using prompt shift device
IBM32 citations92
US6297127B1Oct 2, 2001
Self-aligned deep trench isolation to shallow trench isolation
IBM40 citations92
US6294449B1Sep 25, 2001
Self-aligned contact for closely spaced transistors
IBM37 citations92
US5562770AOct 8, 1996
Semiconductor manufacturing process for low dislocation defects
IBM42 citations92
US5538592AJul 23, 1996
Non-random sub-lithography vertical stack capacitor
IBM37 citations92
US5578854ANov 26, 1996
Vertical load resistor SRAM cell
IBM34 citations86
US6950188B2Sep 27, 2005
Wafer alignment system using parallel imaging detection
IBM18 citations84
US5556802ASep 17, 1996
Method of making corrugated vertical stack capacitor (CVSTC)
IBM12 citations74
US6238963B1May 29, 2001
Damascene process for forming ferroelectric capacitors
IBM9 citations73
US7329602B2Feb 12, 2008
Wiring structure for integrated circuit with reduced intralevel capacitance
IBM6 citations63
US6429101B1Aug 6, 2002
Method of forming thermally stable polycrystal to single crystal electrical contact structure
IBM3 citations59
US7438822B2Oct 21, 2008
Apparatus and method for shielding a wafer from charged particles during plasma etching
IBM0 citations52