Inventor
MIYAZAKI YOKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “MIYAZAKI YOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
12 patentsUS6031607AFeb 29, 2000
System and method for inspecting pattern defect
MITSUBISHI ELECTRIC CORP76 citations95
US6437862B1Aug 20, 2002
Defect inspection apparatus
MITSUBISHI ELECTRIC CORP35 citations92
US6016562AJan 18, 2000
Inspection data analyzing apparatus for in-line inspection with enhanced display of inspection results
MITSUBISHI ELECTRIC CORP49 citations92
US5289260AFeb 22, 1994
Pattern defect detection device and a spatial frequency filter used therein
MITSUBISHI ELECTRIC CORP25 citations92
US5379150AJan 3, 1995
Method of manufacturing a spatial frequency filter for use in a pattern defect detection device
MITSUBISHI ELECTRIC CORP13 citations73
US5170063ADec 8, 1992
Inspection device for detecting defects in a periodic pattern on a semiconductor wafer
MITSUBISHI ELECTRIC CORP15 citations73
US6400038B2Jun 4, 2002
Alignment method and semiconductor device
MITSUBISHI ELECTRIC CORP5 citations72
US6295126B1Sep 25, 2001
Inspection apparatus for foreign matter and pattern defect
MITSUBISHI ELECTRIC CORP6 citations72
US6242318B1Jun 5, 2001
Alignment method and semiconductor device
MITSUBISHI ELECTRIC CORP8 citations72
US6528334B1Mar 4, 2003
Semiconductor inspection system, and method of manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP10 citations69
US6344897B2Feb 5, 2002
Inspection apparatus for foreign matter and pattern defect
MITSUBISHI ELECTRIC CORP5 citations61
US6551847B2Apr 22, 2003
Inspection analyzing apparatus and semiconductor device
MITSUBISHI ELECTRIC CORP5 citations54