Inventor
MUGIBAYASHI TOSHIAKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MUGIBAYASHI TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
6 patentsUS6473665B2Oct 29, 2002
Defect analysis method and process control method
MITSUBISHI ELECTRIC CORP37 citations91
US6341241B1Jan 22, 2002
Defect analysis method and process control method
MITSUBISHI ELECTRIC CORP36 citations91
US6400038B2Jun 4, 2002
Alignment method and semiconductor device
MITSUBISHI ELECTRIC CORP5 citations72
US6295126B1Sep 25, 2001
Inspection apparatus for foreign matter and pattern defect
MITSUBISHI ELECTRIC CORP6 citations72
US6242318B1Jun 5, 2001
Alignment method and semiconductor device
MITSUBISHI ELECTRIC CORP8 citations72
US6344897B2Feb 5, 2002
Inspection apparatus for foreign matter and pattern defect
MITSUBISHI ELECTRIC CORP5 citations61