Inventor

SPIEGELMAN JEFFREY J

US51 patents

⚠️ This page may combine multiple inventors who share the name “SPIEGELMAN JEFFREY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPIEGELMAN JEFFREY J

RASIRC INC

Method and system for decontaminating materials

Method, system, and device for delivery of high purity hydrogen peroxide

Devices, systems, and methods for controlled delivery of process gases

Hydrogen peroxide plasma etch of ashable hard mask

Suppression of hydrogen degradation

Method and system for decontaminating materials

Methods and systems for delivering process gases to critical process applications

Suppression of hydrogen degradation

Method, system, and device for storage and delivery of process gas from a substrate

Method, system, and device for storage and delivery of process gas from a substrate

Method, system, and device for storage and delivery of process gas from a substrate

Gas recovery systems and methods

Hydrogen peroxide plasma surface modification

System, device, and method for controlling mass flow of a catalytically reactive gas in a mixed gas stream

Controlled vapor delivery into low pressure processes

Method, system, and device for delivery of process gas

AERONEX INC

Method for water removal from corrosive gas streams

Method for purification of lens gases used in photolithography

Gas purification system and method

Self-regenerative process for contaminant removal from liquid and supercritical CO2 fluid streams

Method for recovery and reuse of gas

Method for purification of lens gases used in photolithography

Method for rapid activation or preconditioning of porous gas purification substrates

Self-regenerative process for contaminant removal from ammonia

Method, composition and apparatus for water removal from non-corrosive gas streams

Gas purifier apparatus

Recovery and purification of gases used in medical processes

Gas purification apparatus

Offset filter housing

ENTEGRIS INC

Method for the removal of airborne molecular contaminants using water gas mixtures

Method for the removal of airborne molecular contaminants using oxygen gas mixtures

Lithographic projection apparatus, purge gas supply system and gas purging method

Self-regenerative process for contaminant removal from ammonia

Method for purifying carbon dioxide

Hydride gas purification for the semiconductor industry

Method of identifying fluid purification equipment which is optimized for individual fluid purification systems

SPIEGELMAN JEFFREY J

Method of producing high purity steam

Method of producing high purity steam

Method for analysis of contaminants in a process fluid stream

Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures

MYKROLIS CORP

Method for the removal of airborne molecular contaminants using water gas mixtures

Method for purification of lens gases used in photolithography and metrology

Method for rapid activation or preconditioning of porous gas purification substrates

RASIRC

Vaporizer for delivery of low vapor pressure gases

Methods and devices for producing high purity steam

Fluid connector

ASML NETHERLANDS BV

Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system

Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system

TYLAN GENERAL INC

Coupling for interconnection of coaxial tubing

BRIGHAM & WOMENS HOSPITAL

Method and apparatus for delivering and recovering gasses