Inventor

LIEBERMAN JON E

US2 patents

⚠️ This page may combine multiple inventors who share the name “LIEBERMAN JON E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US4945246AJul 31, 1990

Tri-deflection electron beam system

IBM21 citations80

NIKON CORP

1 patent

US6573514B2Jun 3, 2003

Method for aligning electron beam projection lithography tool

NIKON CORP1 citations49