Inventor
TSURUTA HIDEYOSHI
JP29 patents
⚠️ This page may combine multiple inventors who share the name “TSURUTA HIDEYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
28 patentsUS6608745B2Aug 19, 2003
Electrostatic chunks
NGK INSULATORS LTD496 citations99
US6057513AMay 2, 2000
Joint structure of metal member and ceramic member and method of producing the same
NGK INSULATORS LTD92 citations98
US7247819B2Jul 24, 2007
Substrate heating apparatus
NGK INSULATORS LTD26 citations92
US7189946B2Mar 13, 2007
Substrate heating device
NGK INSULATORS LTD30 citations92
US7044399B2May 16, 2006
Heating systems
NGK INSULATORS LTD22 citations92
US6800576B2Oct 5, 2004
Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses
NGK INSULATORS LTD22 citations92
US6617514B1Sep 9, 2003
Ceramics joint structure and method of producing the same
NGK INSULATORS LTD36 citations92
US6225606B1May 1, 2001
Ceramic heater
NGK INSULATORS LTD31 citations92
US5995357ANov 30, 1999
Ceramic member-electric power supply connector coupling structure
NGK INSULATORS LTD23 citations92
US5794838AAug 18, 1998
Ceramics joined body and method of joining ceramics
NGK INSULATORS LTD46 citations92
US7582184B2Sep 1, 2009
Plasma processing member
NGK INSULATORS LTD26 citations90
US7525071B2Apr 28, 2009
Power-supplying member and heating apparatus using the same
NGK INSULATORS LTD12 citations84
US7042697B2May 9, 2006
Electrostatic chucks and electrostatically attracting structures
NGK INSULATORS LTD18 citations84
US7060945B2Jun 13, 2006
Substrate heater and fabrication method for the same
NGK INSULATORS LTD11 citations83
US7126093B2Oct 24, 2006
Heating systems
NGK INSULATORS LTD7 citations74
US7247818B2Jul 24, 2007
Substrate heating apparatus and manufacturing method for the same
NGK INSULATORS LTD7 citations73
US6785115B2Aug 31, 2004
Electrostatic chuck and substrate processing apparatus
NGK INSULATORS LTD11 citations73
US7679034B2Mar 16, 2010
Power-supplying member and heating apparatus using the same
NGK INSULATORS LTD5 citations63
US7022947B2Apr 4, 2006
Systems for supporting ceramic susceptors
NGK INSULATORS LTD2 citations63
US6636413B2Oct 21, 2003
Electrostatic chucks and process for producing the same
NGK INSULATORS LTD5 citations63
US7403386B2Jul 22, 2008
Electrostatic chuck
NGK INSULATORS LTD6 citations62
US7763831B2Jul 27, 2010
Heating device
NGK INSULATORS LTD6 citations61
US7576967B2Aug 18, 2009
Electrostatic chuck
NGK INSULATORS LTD4 citations61
US6728091B2Apr 27, 2004
Electrostatic adsorption device
NGK INSULATORS LTD6 citations60
US7220320B2May 22, 2007
Systems for producing semiconductors and members therefor
NGK INSULATORS LTD0 citations52
US7157666B2Jan 2, 2007
Systems for producing semiconductors and members therefor
NGK INSULATORS LTD1 citations52
US7067200B2Jun 27, 2006
Joined bodies and a method of producing the same
NGK INSULATORS LTD0 citations52
US10037910B2Jul 31, 2018
Wafer holder and method for manufacturing the same
NGK INSULATORS LTD0 citations45