Inventor
NASHIMOTO KIYOSHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “NASHIMOTO KIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
3 patentsUS5334251AAug 2, 1994
Method of and apparatus for controlling temperature in the processing of a substrate
ANELVA CORP21 citations89
US5147498ASep 15, 1992
Apparatus for controlling temperature in the processing of a substrate
ANELVA CORP38 citations89
US5956616ASep 21, 1999
Method of depositing thin films by plasma-enhanced chemical vapor deposition
ANELVA CORP12 citations73