Inventor
RICHTER MICHAEL W
US7 patents
⚠️ This page may combine multiple inventors who share the name “RICHTER MICHAEL W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED KOMATSU TECHNOLOGY INC
5 patentsUS6086362AJul 11, 2000
Multi-function chamber for a substrate processing system
APPLIED KOMATSU TECHNOLOGY INC105 citations98
US6435868B2Aug 20, 2002
Multi-function chamber for a substrate processing system
APPLIED KOMATSU TECHNOLOGY INC79 citations97
US6286230B1Sep 11, 2001
Method of controlling gas flow in a substrate processing system
APPLIED KOMATSU TECHNOLOGY INC101 citations97
US6016611AJan 25, 2000
Gas flow control in a substrate processing system
APPLIED KOMATSU TECHNOLOGY INC88 citations97
US6193507B1Feb 27, 2001
Multi-function chamber for a substrate processing system
APPLIED KOMATSU TECHNOLOGY INC47 citations96