Inventor
YAMASAKA MINORU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “YAMASAKA MINORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6638403B1Oct 28, 2003
Plasma processing apparatus with real-time particle filter
HITACHI LTD53 citations93
US6875326B2Apr 5, 2005
Plasma processing apparatus with real-time particle filter
HITACHI LTD9 citations71
US6631547B2Oct 14, 2003
Manufacturing method for thin film magnetic heads
HITACHI LTD3 citations62