Inventor
MATTE STEPHEN R
US14 patents
⚠️ This page may combine multiple inventors who share the name “MATTE STEPHEN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HELIX TECH CORP
12 patentsUS5443368AAug 22, 1995
Turbomolecular pump with valves and integrated electronic controls
HELIX TECH CORP133 citations96
US6902378B2Jun 7, 2005
Electronically controlled vacuum pump
HELIX TECH CORP49 citations95
US6022195AFeb 8, 2000
Electronically controlled vacuum pump with control module
HELIX TECH CORP80 citations95
US6155059ADec 5, 2000
High capacity cryopump
HELIX TECH CORP33 citations92
US5901558AMay 11, 1999
Water pump with integral gate valve
HELIX TECH CORP19 citations92
US5537833AJul 23, 1996
Shielded cryogenic trap
HELIX TECH CORP22 citations92
US5483803AJan 16, 1996
High conductance water pump
HELIX TECH CORP37 citations92
US6461113B1Oct 8, 2002
Electronically controlled vacuum pump
HELIX TECH CORP36 citations91
US5727392AMar 17, 1998
Convection-shielded cryopump
HELIX TECH CORP11 citations73
US5799493ASep 1, 1998
Corrosion resistant cryopump
HELIX TECH CORP4 citations56
US5887438AMar 30, 1999
Low profile in line cryogenic water pump
HELIX TECH CORP5 citations53
US5906103AMay 25, 1999
Convection-shielded cryopump
HELIX TECH CORP1 citations51