Inventor
TEZUKA YOSHIHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TEZUKA YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
6 patentsUS7005649B1Feb 28, 2006
Mask blanks inspection method and mask blank inspection tool
INTEL CORP25 citations92
US6210843B1Apr 3, 2001
Modulation of peripheral critical dimension on photomask with differential electron beam dose
INTEL CORP15 citations76
US7220969B2May 22, 2007
Mask blanks inspection tool
INTEL CORP4 citations62
US7679731B2Mar 16, 2010
Detecting and characterizing mask blank defects using angular distribution of scattered light
INTEL CORP4 citations61
US12032298B2Jul 9, 2024
Measurement tool and method for lithography masks
INTEL CORP0 citations54
US11815810B2Nov 14, 2023
Measurement tool and methods for EUV lithography masks
INTEL CORP0 citations53