Inventor
WEEKS KEITH D
US8 patents
⚠️ This page may combine multiple inventors who share the name “WEEKS KEITH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
5 patentsUS7297641B2Nov 20, 2007
Method to form ultra high quality silicon-containing compound layers
ASM INC625 citations98
US7964513B2Jun 21, 2011
Method to form ultra high quality silicon-containing compound layers
ASM INC75 citations97
US7651953B2Jan 26, 2010
Method to form ultra high quality silicon-containing compound layers
ASM INC79 citations97
US7029995B2Apr 18, 2006
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy
ASM INC39 citations91
US7005160B2Feb 28, 2006
Methods for depositing polycrystalline films with engineered grain structures
ASM INC18 citations83