Inventor
HETHERINGTON DALE L
US5 patents
Patents
5 patentsUS5998298ADec 7, 1999
Use of chemical-mechanical polishing for fabricating photonic bandgap structures
SANDIA CORP166 citations97
US5919548AJul 6, 1999
Chemical-mechanical polishing of recessed microelectromechanical devices
SANDIA CORP269 citations97
US5804084ASep 8, 1998
Use of chemical mechanical polishing in micromachining
SANDIA CORP125 citations95
US7004198B1Feb 28, 2006
Micro-fluidic interconnect
SANDIA CORP35 citations92
US6808952B1Oct 26, 2004
Process for fabricating a microelectromechanical structure
SANDIA CORP44 citations90