Inventor

KUBENA RANDALL L

US93 patents

⚠️ This page may combine multiple inventors who share the name “KUBENA RANDALL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KUBENA RANDALL L

HRL LAB LLC

Quartz-based nanoresonators and method of fabricating same

Quartz-based nanoresonator

Method for fabricating a resonator

High-Q quartz-based inductor array for antenna matching

ALD metal coatings for high Q MEMS structures

Integrated quartz MEMS tuning fork resonator/oscillator

MEMS-based quartz hybrid filters and a method of making the same

Integrated quartz oscillator on an active electronic substrate

Method of fabricating an ultra thin quartz resonator component

Method for fabricating quartz-based nanoresonators

Method for large scale integration of quartz-based devices

Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense

Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials

Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same

Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same

Method of manufacturing a dual wafer tunneling gyroscope

Method for producing a disk resonator gyroscope

Low frequency quartz based MEMS resonators and method of fabricating the same

Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects

Micro electrical mechanical system (MEMS) tuning using focused ion beams

Single crystal dual wafer, tunneling sensor and a method of making same

Phononic comb enhanced gradiometers

Femto-tesla MEMS RF antenna with integrated flux concentrator

Quartz MEMS piezoelectric resonator for chipscale RF antennae

Broadband integrated RF magnetic antenna

Enhanced stability oscillators using a phononic comb

High stability angular sensor

High dynamic range gyroscope

High-Q quartz-based inductors for high power LF communication

Rounded and curved integrated tethers for quartz resonators

Quartz resonator with plasma etched tethers for stress isolation from the mounting contacts

Resonator assembly comprising a silicon resonator and a quartz resonator

HUGHES AIRCRAFT CO

Single-wafer tunneling sensor and low-cost IC manufacturing method

Quantum well structure with self-aligned gate and method of making the same

Tunneling-based rate gyros with simple drive and sense axis coupling

Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams

Method of manufacturing single-wafer tunneling sensor

Secondary ion mass spectrometry system and method for focused ion beam with parallel ion detection

KUBENA RANDALL L

MEMS on-chip inertial navigation system with error correction

Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same

MEMS on-chip inertial navigation system with error correction

Method of fabricating quartz resonators

Frequency locking of resonators for improved temperature control of gyroscopes

HUGHES ELECTRONICS CORP

Tunneling rotation sensor

Method of in-situ displacement/stress control in electroplating

Tunneling-based rate gyros with simple drive and sense axis coupling

BOEING CO

Disc resonator gyroscopes

Microgyro tuning using focused ion beams

CHANG DAVID T

Quartz-based MEMS resonators and methods of fabricating same

Large area integration of quartz resonators with electronics