Inventor
COSTON SCOTT
US5 patents
⚠️ This page may combine multiple inventors who share the name “COSTON SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
4 patentsUS7006295B2Feb 28, 2006
Illumination system and method for efficiently illuminating a pattern generator
ASML HOLDING NV15 citations91
US7187430B2Mar 6, 2007
Advanced illumination system for use in microlithography
ASML HOLDING NV10 citations82
US6775069B2Aug 10, 2004
Advanced illumination system for use in microlithography
ASML HOLDING NV18 citations80
US7158307B2Jan 2, 2007
Efficiently illuminating a modulating device
ASML HOLDING NV4 citations61