Inventor
HINTERSTEINER JASON D
US12 patents
⚠️ This page may combine multiple inventors who share the name “HINTERSTEINER JASON D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
11 patentsUS6831768B1Dec 14, 2004
Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
ASML HOLDING NV39 citations94
US7061591B2Jun 13, 2006
Maskless lithography systems and methods utilizing spatial light modulator arrays
ASML HOLDING NV24 citations91
US7006295B2Feb 28, 2006
Illumination system and method for efficiently illuminating a pattern generator
ASML HOLDING NV15 citations91
US7046413B2May 16, 2006
System and method for dose control in a lithographic system
ASML HOLDING NV6 citations72
US6985280B2Jan 10, 2006
Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
ASML HOLDING NV4 citations72
US7542013B2Jun 2, 2009
System and method for imaging enhancement via calculation of a customized optimal pupil field and illumination mode
ASML HOLDING NV2 citations62
US7463402B2Dec 9, 2008
Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography
ASML HOLDING NV1 citations61
US7158307B2Jan 2, 2007
Efficiently illuminating a modulating device
ASML HOLDING NV4 citations61
US7859735B2Dec 28, 2010
Systems and methods for minimizing scattered light in multi-SLM maskless lithography
ASML HOLDING NV2 citations60
US7567368B2Jul 28, 2009
Systems and methods for minimizing scattered light in multi-SLM maskless lithography
ASML HOLDING NV3 citations60
US6989920B2Jan 24, 2006
System and method for dose control in a lithographic system
ASML HOLDING NV2 citations60