Inventor
HUMMEL RENE
CH12 patents
⚠️ This page may combine multiple inventors who share the name “HUMMEL RENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INVENSENSE INC
6 patentsUS9581512B2Feb 28, 2017
Pressure sensor with deformable membrane and method of manufacture
INVENSENSE INC7 citations82
US10161817B2Dec 25, 2018
Reduced stress pressure sensor
INVENSENSE INC3 citations70
US9958349B2May 1, 2018
Pressure sensor
INVENSENSE INC2 citations70
US10816422B2Oct 27, 2020
Pressure sensor
INVENSENSE INC0 citations50
US10712218B2Jul 14, 2020
Pressure sensor
INVENSENSE INC0 citations49
US10254185B2Apr 9, 2019
Pressure sensor
INVENSENSE INC0 citations49
SENSIRION AG
5 patentsUS7901971B2Mar 8, 2011
Method for manufacturing a sensor device with a stress relief layer
SENSIRION AG11 citations82
US7281405B2Oct 16, 2007
Method and device for calibration sensors
SENSIRION AG13 citations81
US7900496B2Mar 8, 2011
Method and device for calibration sensors
SENSIRION AG3 citations60
US9224658B2Dec 29, 2015
Membrane-based sensor device with non-dielectric etch-stop layer around substrate recess
SENSIRION AG2 citations59
US9140740B2Sep 22, 2015
Sensor chip and method for manufacturing a sensor chip
SENSIRION AG0 citations49