Inventor
DE KORT ANTONIUS JOHANNES
NL4 patents
Patents
4 patentsUS7804582B2Sep 28, 2010
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US7426011B2Sep 16, 2008
Method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7423725B2Sep 9, 2008
Lithographic method
ASML NETHERLANDS BV5 citations60
US7652749B2Jan 26, 2010
Software upgrades in a lithographic apparatus
ASML NETHERLANDS BV0 citations38