Inventor

LIU SHENG-CHIEH

TW2 patents

Patents

2 patents

US7494830B2Feb 24, 2009

Method and device for wafer backside alignment overlay accuracy

TAIWAN SEMICONDUCTOR MFG23 citations88

US7611960B2Nov 3, 2009

Method and system for wafer backside alignment

TAIWAN SEMICONDUCTOR MFG5 citations58