Inventor
HEFTY ROBERT
US3 patents
Patents
3 patentsUS7291286B2Nov 6, 2007
Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses
LAM RES CORP2 citations57
US7226869B2Jun 5, 2007
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
LAM RES CORP1 citations46
US7558641B2Jul 7, 2009
Recipe report card framework and methods thereof
LAM RES CORP0 citations35