Inventor
LUI ANDREW
US7 patents
⚠️ This page may combine multiple inventors who share the name “LUI ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS6815362B1Nov 9, 2004
End point determination of process residues in wafer-less auto clean process using optical emission spectroscopy
LAM RES CORP71 citations97
US7356580B1Apr 8, 2008
Plug and play sensor integration for a process module
LAM RES CORP37 citations91
US6526355B1Feb 25, 2003
Integrated full wavelength spectrometer for wafer processing
LAM RES CORP23 citations91
US7672747B2Mar 2, 2010
Recipe-and-component control module and methods thereof
LAM RES CORP16 citations83
US6855567B1Feb 15, 2005
Etch endpoint detection
LAM RES CORP13 citations83
US7558641B2Jul 7, 2009
Recipe report card framework and methods thereof
LAM RES CORP0 citations35