Inventor
LIU WEN-PIN
TW10 patents
⚠️ This page may combine multiple inventors who share the name “LIU WEN-PIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LIU WEN-PIN
3 patentsTAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS9639774B2May 2, 2017
Method for determining applicabilty of a processing device, a processing path and a processing pattern
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations68
US11654461B2May 23, 2023
Plasma ashing method using residue gas analyzer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11020778B2Jun 1, 2021
Photoresist removal method using residue gas analyzer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58