Inventor

RENNON SIEGFRIED

DE4 patents

⚠️ This page may combine multiple inventors who share the name “RENNON SIEGFRIED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

1 patent

US7880969B2Feb 1, 2011

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

ZEISS CARL SMT AG4 citations60

WOLF OLIVER

1 patent

US8520307B2Aug 27, 2013

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

WOLF OLIVER4 citations54

ZEISS CARL SMT GMBH

1 patent

US9921483B2Mar 20, 2018

Surface correction of mirrors with decoupling coating

ZEISS CARL SMT GMBH1 citations46

RENNON SIEGFRIED

1 patent

US8693098B2Apr 8, 2014

Projection objective for a microlithographic EUV projection exposure apparatus

RENNON SIEGFRIED1 citations43