Inventor

BRESAN ANDRE

DE3 patents

⚠️ This page may combine multiple inventors who share the name “BRESAN ANDRE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL LASER OPTICS GMBH

1 patent

US9541685B2Jan 10, 2017

Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type

ZEISS CARL LASER OPTICS GMBH10 citations80

ZEISS CARL SMT AG

1 patent

US7880969B2Feb 1, 2011

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

ZEISS CARL SMT AG4 citations60

WOLF OLIVER

1 patent

US8520307B2Aug 27, 2013

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

WOLF OLIVER4 citations54