Inventor
SCHOLZ AXEL
DE26 patents
⚠️ This page may combine multiple inventors who share the name “SCHOLZ AXEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
8 patentsUS9280060B2Mar 8, 2016
Illumination system for microlithography
ZEISS CARL SMT GMBH5 citations82
US8004656B2Aug 23, 2011
Illumination system for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH5 citations63
US7940375B2May 10, 2011
Transmission filter apparatus
ZEISS CARL SMT GMBH3 citations63
US9606441B2Mar 28, 2017
Illumination system for microlithography
ZEISS CARL SMT GMBH1 citations61
US9217930B2Dec 22, 2015
Illumination system for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations60
US10088754B2Oct 2, 2018
Illumination system for microlithography
ZEISS CARL SMT GMBH0 citations50
US9575414B2Feb 21, 2017
Illumination system for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations50
US9753375B2Sep 5, 2017
Illumination optical unit for projection lithography
ZEISS CARL SMT GMBH0 citations40
ZEISS CARL SMT AG
6 patentsUS7408622B2Aug 5, 2008
Illumination system and polarizer for a microlithographic projection exposure apparatus
ZEISS CARL SMT AG27 citations92
US7473907B2Jan 6, 2009
Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination
ZEISS CARL SMT AG26 citations90
US7875865B2Jan 25, 2011
EUV illumination system with a system for measuring fluctuations of the light source
ZEISS CARL SMT AG9 citations82
US7686505B2Mar 30, 2010
Method and system for indirect determination of local irradiance in an optical system
ZEISS CARL SMT AG4 citations62
US7880969B2Feb 1, 2011
Optical integrator for an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT AG4 citations60
US7847920B2Dec 7, 2010
Illumination system and polarizer for a microlithographic projection exposure apparatus
ZEISS CARL SMT AG0 citations52
EDSCHA TRAILER SYSTEMS GMBH
3 patentsUSD751024SMar 8, 2016
Guide rails for a tarpaulin cover of a commercial vehicle
EDSCHA TRAILER SYSTEMS GMBH17 citations88
USD750544SMar 1, 2016
Guide rails for a tarpaulin cover of a commercial vehicle
EDSCHA TRAILER SYSTEMS GMBH7 citations79
USD753576SApr 12, 2016
Guide rails for a tarpaulin cover of a commercial vehicle
EDSCHA TRAILER SYSTEMS GMBH5 citations68