Inventor
NIEWMIERZYCKI LESZEK
US8 patents
⚠️ This page may combine multiple inventors who share the name “NIEWMIERZYCKI LESZEK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
6 patentsUS6315512B1Nov 13, 2001
Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber
MATTSON TECH INC737 citations97
US6647665B1Nov 18, 2003
Door systems for low contamination, high throughput handling of workpieces for vacuum processing
MATTSON TECH INC58 citations94
US6568552B1May 27, 2003
Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
MATTSON TECH INC45 citations94
US7658586B2Feb 9, 2010
Advanced low cost high throughput processing platform
MATTSON TECH INC20 citations91
US7563068B2Jul 21, 2009
Low cost high throughput processing platform
MATTSON TECH INC16 citations91
US9493306B2Nov 15, 2016
Low cost high throughput processing platform
MATTSON TECH INC5 citations83