Inventor
PAKULSKI RYAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “PAKULSKI RYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
6 patentsUS7658586B2Feb 9, 2010
Advanced low cost high throughput processing platform
MATTSON TECH INC20 citations91
US7563068B2Jul 21, 2009
Low cost high throughput processing platform
MATTSON TECH INC16 citations91
US10580672B2Mar 3, 2020
Systems and methods for workpiece processing
MATTSON TECH INC3 citations72
US11201036B2Dec 14, 2021
Plasma strip tool with uniformity control
MATTSON TECH INC2 citations70
US10790119B2Sep 29, 2020
Plasma processing apparatus with post plasma gas injection
MATTSON TECH INC5 citations70
US11257696B2Feb 22, 2022
Systems and methods for workpiece processing
MATTSON TECH INC0 citations62
APPLIED MATERIALS INC
3 patentsUS12362150B2Jul 15, 2025
Semiconductor chamber components with advanced coating techniques
APPLIED MATERIALS INC0 citations57
US12575360B2Mar 10, 2026
Semiconductor processing chamber adapter
APPLIED MATERIALS INC0 citations51
US12567565B2Mar 3, 2026
Method of isolating the chamber volume to process volume with internal wafer transfer capability
APPLIED MATERIALS INC0 citations49