Inventor
ZUCKER MARTIN
US6 patents
⚠️ This page may combine multiple inventors who share the name “ZUCKER MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
4 patentsUS7658586B2Feb 9, 2010
Advanced low cost high throughput processing platform
MATTSON TECH INC20 citations91
US7563068B2Jul 21, 2009
Low cost high throughput processing platform
MATTSON TECH INC16 citations91
US10049858B2Aug 14, 2018
System and method for protection of vacuum seals in plasma processing systems
MATTSON TECH INC5 citations68
US12535273B2Jan 27, 2026
Workpiece processing apparatus with thermal processing systems
MATTSON TECH INC0 citations48