Inventor
ADEL MICHAEL
IL44 patents
⚠️ This page may combine multiple inventors who share the name “ADEL MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
13 patentsUS7068833B1Jun 27, 2006
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR CORP81 citations99
US7177457B2Feb 13, 2007
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR CORP33 citations96
US9347879B2May 24, 2016
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR CORP17 citations93
US7274814B2Sep 25, 2007
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR CORP18 citations93
US10451412B2Oct 22, 2019
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR CORP7 citations84
US9702693B2Jul 11, 2017
Apparatus for measuring overlay errors
KLA TENCOR CORP6 citations84
US7602491B2Oct 13, 2009
Optical gain approach for enhancement of overlay and alignment systems performance
KLA TENCOR CORP13 citations84
US10387608B2Aug 20, 2019
Metrology target identification, design and verification
KLA TENCOR CORP6 citations81
US9910953B2Mar 6, 2018
Metrology target identification, design and verification
KLA TENCOR CORP7 citations81
US10890436B2Jan 12, 2021
Overlay targets with orthogonal underlayer dummyfill
KLA TENCOR CORP4 citations73
US9576861B2Feb 21, 2017
Method and system for universal target based inspection and metrology
KLA TENCOR CORP2 citations72
US10763146B2Sep 1, 2020
Recipe optimization based zonal analysis
KLA TENCOR CORP1 citations59
US9559019B2Jan 31, 2017
Metrology through use of feed forward feed sideways and measurement cell re-use
KLA TENCOR CORP0 citations52
KLA TENCOR TECH CORP
13 patentsUS6985618B2Jan 10, 2006
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR TECH CORP98 citations99
US7317531B2Jan 8, 2008
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP83 citations98
US7879627B2Feb 1, 2011
Overlay marks and methods of manufacturing such marks
KLA TENCOR TECH CORP25 citations96
US7181057B2Feb 20, 2007
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR TECH CORP40 citations96
US7355291B2Apr 8, 2008
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR TECH CORP13 citations93
US7317824B2Jan 8, 2008
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR TECH CORP22 citations93
US7933016B2Apr 26, 2011
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP15 citations92
US7804994B2Sep 28, 2010
Overlay metrology and control method
KLA TENCOR TECH CORP54 citations92
US7663753B2Feb 16, 2010
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP19 citations92
US7571422B2Aug 4, 2009
Method for generating a design rule map having spatially varying overlay budget
KLA TENCOR TECH CORP36 citations92
US7075639B2Jul 11, 2006
Method and mark for metrology of phase errors on phase shift masks
KLA TENCOR TECH CORP17 citations92
US7368208B1May 6, 2008
Measuring phase errors on phase shift masks
KLA TENCOR TECH CORP12 citations84
US7684039B2Mar 23, 2010
Overlay metrology using the near infra-red spectral range
KLA TENCOR TECH CORP11 citations82
ADEL MICHAEL
5 patentsUS9116442B2Aug 25, 2015
Feedforward/feedback litho process control of stress and overlay
ADEL MICHAEL18 citations92
US8214771B2Jul 3, 2012
Scatterometry metrology target design optimization
ADEL MICHAEL32 citations92
US8111376B2Feb 7, 2012
Feedforward/feedback litho process control of stress and overlay
ADEL MICHAEL20 citations92
US9151712B1Oct 6, 2015
Rule checking for metrology and inspection
ADEL MICHAEL16 citations84
US8930156B2Jan 6, 2015
Metrology through use of feed forward feed sideways and measurement cell re-use
ADEL MICHAEL5 citations73