P

Inventor

MOTOKAWA TAKEHARU

JP12 patents
⚠️ This page may combine multiple inventors who share the name “MOTOKAWA TAKEHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIOXIA CORP

5 patents
US12573596B2Mar 10, 2026

Plasma treatment apparatus, plasma treatment method, and original plate manufacturing method

KIOXIA CORP0 citations61
US12575385B2Mar 10, 2026

Etching method, etching apparatus, manufacturing method of semiconductor device, and manufacturing method of template

KIOXIA CORP0 citations61
US11789365B2Oct 17, 2023

Substrate processing method and substrate processing apparatus

KIOXIA CORP0 citations61
US11493846B2Nov 8, 2022

Pattern forming method and template manufacturing method

KIOXIA CORP0 citations61
US11931923B2Mar 19, 2024

Method of manufacturing template and method of forming pattern

KIOXIA CORP0 citations50

TOSHIBA MEMORY CORP

3 patents
US10811252B2Oct 20, 2020

Pattern-forming method

TOSHIBA MEMORY CORP1 citations62
US9976948B2May 22, 2018

Phase separation observation method, phase separation observation apparatus, annealing apparatus, and producing method for substrate

TOSHIBA MEMORY CORP0 citations49
US9841674B2Dec 12, 2017

Patterning method, and template for nanoimprint and producing method thereof

TOSHIBA MEMORY CORP0 citations45

SHIBAURA MECHATRONICS CORP

2 patents
US9507251B2Nov 29, 2016

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask

SHIBAURA MECHATRONICS CORP0 citations45
US10111313B2Oct 23, 2018

Plasma processing apparatus and plasma processing method

SHIBAURA MECHATRONICS CORP0 citations33

MOTOKAWA TAKEHARU

1 patent
US8834674B2Sep 16, 2014

Plasma etching apparatus

MOTOKAWA TAKEHARU5 citations64

YOSHIMORI TOMOAKI

1 patent
US8702901B2Apr 22, 2014

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask

YOSHIMORI TOMOAKI0 citations39