P

Inventor

AZUMANO HIDEHITO

JP7 patents
⚠️ This page may combine multiple inventors who share the name “AZUMANO HIDEHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIBAURA MECHATRONICS CORP

4 patents
US11387083B2Jul 12, 2022

Plasma processing apparatus

SHIBAURA MECHATRONICS CORP2 citations69
US11387082B2Jul 12, 2022

Plasma processing apparatus

SHIBAURA MECHATRONICS CORP2 citations69
US11437224B2Sep 6, 2022

Plasma processing apparatus

SHIBAURA MECHATRONICS CORP0 citations59
US10111313B2Oct 23, 2018

Plasma processing apparatus and plasma processing method

SHIBAURA MECHATRONICS CORP0 citations33

SHIBAURA ENG WORKS LTD

1 patent
US6045315AApr 4, 2000

Robot apparatus and treating apparatus

SHIBAURA ENG WORKS LTD80 citations91

MOTOKAWA TAKEHARU

1 patent
US8834674B2Sep 16, 2014

Plasma etching apparatus

MOTOKAWA TAKEHARU5 citations64

AZUMANO HIDEHITO

1 patent
US8434993B2May 7, 2013

Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method

AZUMANO HIDEHITO1 citations43