Inventor
VAN NUNSPEET WILHELMUS V J
NL2 patents
Patents
2 patentsUS9018604B2Apr 28, 2015
Arrangement for the handling of a liquid metal for cooling revolving components of a radiation source based on a radiation-emitting plasma
USHIO ELECTRIC INC6 citations58
US9202659B2Dec 1, 2015
Arrangement and method for cooling a plasma-based radiation source
USHIO ELECTRIC INC0 citations29