Inventor
LU BRIAN
US16 patents
⚠️ This page may combine multiple inventors who share the name “LU BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
5 patentsUS7888273B1Feb 15, 2011
Density gradient-free gap fill
NOVELLUS SYSTEMS INC45 citations98
US7629227B1Dec 8, 2009
CVD flowable gap fill
NOVELLUS SYSTEMS INC78 citations98
US7094713B1Aug 22, 2006
Methods for improving the cracking resistance of low-k dielectric materials
NOVELLUS SYSTEMS INC74 citations97
US7381662B1Jun 3, 2008
Methods for improving the cracking resistance of low-k dielectric materials
NOVELLUS SYSTEMS INC32 citations92
US7678709B1Mar 16, 2010
Method of forming low-temperature conformal dielectric films
NOVELLUS SYSTEMS INC3 citations60
ISHIKAWA TETSUYA
3 patentsUS8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92