Inventor
SILVA HUGO
DE4 patents
⚠️ This page may combine multiple inventors who share the name “SILVA HUGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIXTRON SE
3 patentsUS9159608B2Oct 13, 2015
Method for forming TiSiN thin film layer by using atomic layer deposition
AIXTRON SE16 citations79
US10526705B2Jan 7, 2020
Methods for controlling the substrate temperature using a plurality of flushing gases
AIXTRON SE0 citations36
US10273580B2Apr 30, 2019
Heating device
AIXTRON SE0 citations29