Inventor

RAMANATHAN SASANGAN

US9 patents

⚠️ This page may combine multiple inventors who share the name “RAMANATHAN SASANGAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

3 patents

US6589887B1Jul 8, 2003

Forming metal-derived layers by simultaneous deposition and evaporation of metal

NOVELLUS SYSTEMS INC75 citations97

US6951765B1Oct 4, 2005

Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor

NOVELLUS SYSTEMS INC28 citations91

US6887781B2May 3, 2005

Method for the formation of diffusion barrier

NOVELLUS SYSTEMS INC9 citations73

AIXTRON INC

1 patent

US7981473B2Jul 19, 2011

Transient enhanced atomic layer deposition

AIXTRON INC63 citations95

GENUS INC

1 patent

US6720259B2Apr 13, 2004

Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition

GENUS INC56 citations94

QUESTER TECHNOLOGY INC

1 patent

US6015759AJan 18, 2000

Surface modification of semiconductors using electromagnetic radiation

QUESTER TECHNOLOGY INC72 citations93

SHARP KK

1 patent

US5887117AMar 23, 1999

Flash evaporator

SHARP KK62 citations91

AIXTRON SE

1 patent

US9159608B2Oct 13, 2015

Method for forming TiSiN thin film layer by using atomic layer deposition

AIXTRON SE16 citations79

US ARMY

1 patent

US6071555AJun 6, 2000

Ferroelectric thin film composites made by metalorganic decomposition

US ARMY8 citations73