Inventor
CHEN PEI-SHIANG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHEN PEI-SHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS9305799B2Apr 5, 2016
Method and system for E-beam lithography with multi-exposure
TAIWAN SEMICONDUCTOR MFG26 citations94
US8945803B2Feb 3, 2015
Smart subfield method for E-beam lithography
TAIWAN SEMICONDUCTOR MFG26 citations92
US8841049B2Sep 23, 2014
Electron beam data storage system and method for high volume manufacturing
TAIWAN SEMICONDUCTOR MFG28 citations92
US9336986B2May 10, 2016
Electron beam data storage system and method for high volume manufacturing
TAIWAN SEMICONDUCTOR MFG0 citations51
US8877410B2Nov 4, 2014
Data process for E-beam lithography
TAIWAN SEMICONDUCTOR MFG0 citations51