Inventor
Chen yu-huan
TW23 patents
Patents
23 patentsUS12055864B2Aug 6, 2024
Droplet generator and method of servicing a photolithographic tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12002746B2Jun 4, 2024
Chip package structure with metal-containing layer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11302537B2Apr 12, 2022
Chip package structure with conductive adhesive layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11275317B1Mar 15, 2022
Droplet generator and method of servicing a photolithographic tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9748156B1Aug 29, 2017
Semiconductor package assembly, semiconductor package and forming method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11553581B2Jan 10, 2023
Radiation source apparatus and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11533799B1Dec 20, 2022
System and method for supplying target material in an EUV light source
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11747741B2Sep 5, 2023
Substrate stage, substrate processing system using the same, and method for processing substrate
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12405541B2Sep 2, 2025
Methods of servicing photolithographic apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12388003B2Aug 12, 2025
Chip package structure with metal-containing layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12125715B2Oct 22, 2024
Chip package structure with nickel layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12114411B2Oct 8, 2024
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12096543B2Sep 17, 2024
Method for using radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11728180B2Aug 15, 2023
Chip package structure with conductive adhesive layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11602037B1Mar 7, 2023
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11537053B2Dec 27, 2022
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11335634B2May 17, 2022
Chip package structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12167526B2Dec 10, 2024
Method and system for generating droplets for EUV photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12111582B2Oct 8, 2024
Substrate stage and substrate processing system using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12066761B2Aug 20, 2024
Inspection tool for an extreme ultraviolet radiation source to observe tin residual
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11528797B2Dec 13, 2022
Method and system for generating droplets for EUV photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11442365B1Sep 13, 2022
EUV photolithography system and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11556065B2Jan 17, 2023
Wafer stage and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50