Inventor
LERAY PHILIPPE
BE4 patents
Patents
4 patentsUS10061209B2Aug 28, 2018
Method for verifying a pattern of features printed by a lithography process
IMEC VZW2 citations68
US10732124B2Aug 4, 2020
Methods for detecting defects of a lithographic pattern
IMEC VZW3 citations67
US9983154B2May 29, 2018
Method for inspecting a pattern of features on a semiconductor die
IMEC VZW0 citations46
US9874821B2Jan 23, 2018
Method for hotspot detection and ranking of a lithographic mask
IMEC VZW0 citations32